Invention Grant
- Patent Title: Integrated capacitor comprising an electrically insulating layer made of an amorphous perovskite-type material and manufacturing process
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Application No.: US13225451Application Date: 2011-09-04
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Publication No.: US09673269B2Publication Date: 2017-06-06
- Inventor: Emmanuel Defay , Gwenaël Le Rhun , Aurélien Suhm
- Applicant: Emmanuel Defay , Gwenaël Le Rhun , Aurélien Suhm
- Applicant Address: FR Paris
- Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Baker & Hostetler LLP
- Priority: FR1003527 20100903
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01G4/005 ; H01L49/02

Abstract:
An integrated capacitor comprises a layer of dielectric material known as functional dielectric material based on crystallized material of perovskite type, between at least one first electrode known as a bottom electrode at the surface of a substrate and at least one second electrode known as a top electrode, said electrodes being electrically insulated by a layer of electrically insulating material in order to allow at least one contact on the top electrode. The electrically insulating material is made of an amorphous dielectric material of perovskite type having a dielectric constant lower than that of the crystallized material of perovskite type. The contact is formed from an etched contacting layer in contact with the electrically insulating dielectric layer level with its surface parallel to the plane of the layers. A process for manufacturing such an integrated capacitor is also provided.
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