Invention Grant
- Patent Title: Metal insulator metal capacitor and method for making the same
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Application No.: US14867902Application Date: 2015-09-28
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Publication No.: US09673270B2Publication Date: 2017-06-06
- Inventor: Yu-Chia Lai , Tung-Liang Shao , Ching-Jung Yang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/15 ; H01L49/02 ; H01L21/66 ; H01L21/768

Abstract:
A semiconductor device includes one or more metal-insulator-metal (MiM) capacitors. The semiconductor device includes a bottom electrode, a dielectric layer located above, and in physical contact with, the bottom electrode, a top electrode located above, and in physical contact with, the dielectric layer, a first top contact contacting the top electrode, a first bottom contact contacting the bottom electrode from a top electrode direction, a first metal bump connecting to the top contact, and a second metal bump connecting to the bottom contact. The top electrode has a smaller area than the bottom electrode. The bottom electrode, the dielectric layer, and the top electrode is a MiM capacitor. Top electrodes of a number of MiM capacitors and bottom electrodes of a number of MiM capacitors are daisy chained to allow testing of the conductivity of the electrodes.
Public/Granted literature
- US20160020269A1 Metal Insulator Metal Capacitor and Method for Making the Same Public/Granted day:2016-01-21
Information query
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