Invention Grant
- Patent Title: Non-volatile memory unit and method for manufacturing the same
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Application No.: US14994719Application Date: 2016-01-13
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Publication No.: US09673338B2Publication Date: 2017-06-06
- Inventor: Der-Tsyr Fan , Chih-Ming Chen , Jung-Chang Lu
- Applicant: Xinnova Technology Limited
- Applicant Address: CN Beijing
- Assignee: XINNOVA TECHNOLOGY LIMITED
- Current Assignee: XINNOVA TECHNOLOGY LIMITED
- Current Assignee Address: CN Beijing
- Agent Chun-Ming Shih
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L21/265 ; H01L21/28 ; H01L27/11521 ; H01L29/40 ; H01L29/423 ; H01L29/66 ; H01L21/02 ; H01L27/11524

Abstract:
A non-volatile memory unit and method of manufacturing the same are disclosed. The non-volatile memory unit includes a substrate with a source region and a drain region. A first dielectric layer forms on the substrate. An erase gate, a floating gate and couple control gate are forms on the first dielectric layer. The second dielectric layer and coupled dielectric layer are formed among and above the erase gate, the floating gate and the selective gate, and formed on the couple control gate of the coupled dielectric layer.
Public/Granted literature
- US20160204273A1 NON-VOLATILE MEMORY UNIT AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2016-07-14
Information query
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