Invention Grant
- Patent Title: MEMS microphone and forming method therefor
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Application No.: US14004822Application Date: 2012-02-22
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Publication No.: US09674619B2Publication Date: 2017-06-06
- Inventor: Lianjun Liu
- Applicant: Lianjun Liu
- Applicant Address: CN Tianjin
- Assignee: MEMSEN ELECTRONICS INC
- Current Assignee: MEMSEN ELECTRONICS INC
- Current Assignee Address: CN Tianjin
- Agency: Cantor Colburn LLP
- Priority: CN201110061561 20110315
- International Application: PCT/CN2012/071441 WO 20120222
- International Announcement: WO2012/122871 WO 20120920
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R23/00 ; H04R1/04 ; H04R31/00

Abstract:
A micro-electro-mechanical system (MEMS) microphone and a forming method therefore. The MEMS microphone comprises: a first substrate, the first substrate is provided with a first bonding face, the first substrate comprises an MEMS microphone component and a first conductive bonding structure arranged on the first bonding face, a second substrate, the second substrate is provided with a second bonding face, the second bonding substrate comprises a circuit and a second conductive bonding structure arranged on the second bonding face; the first substrate and the second substrate are oppositely fitted together via the first conductive bonding structure and the second conductive bonding structure. Embodiments of the present invention have a simple packaging technique and a compact size; the MEMS microphone packaging structure formed has a great performance on signal-to-noise ratio, and a great anti-interference capability.
Public/Granted literature
- US20140003633A1 MEMS MICROPHONE AND FORMING METHOD THEREFOR Public/Granted day:2014-01-02
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