Invention Grant
- Patent Title: Scanning probe microscope
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Application No.: US14994925Application Date: 2016-01-13
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Publication No.: US09678104B2Publication Date: 2017-06-13
- Inventor: Hiroyoshi Yamamoto
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JP2015-063173 20150325
- Main IPC: G01Q20/02
- IPC: G01Q20/02 ; G01Q30/02

Abstract:
A scanning probe microscope capable of controlling a decrease of the resolution of an objective lens disposed in the scanning probe microscope, and capable of easily carrying out the adjustment of an optical axis of an optical lever using the objective lens. The scanning probe microscope includes: a cantilever having a probe; a light source part radiating beams; a first reflective part reflecting an incident beam (L0) and guiding the incident beam to a reflective surface; a light receiving part receiving the beams; a second reflective part reflecting a reflected beam (L1) and guiding the reflected beam to the light receiving part; and an objective lens disposed to face the cantilever and adopted to observe and capture an area around the cantilever, the objective lens having the number of openings of NA, wherein the first reflective part is disposed at a position between the objective lens and the cantilever.
Public/Granted literature
- US20160282383A1 SCANNING PROBE MICROSCOPE Public/Granted day:2016-09-29
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