Invention Grant
- Patent Title: Probe card
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Application No.: US14151052Application Date: 2014-01-09
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Publication No.: US09678109B2Publication Date: 2017-06-13
- Inventor: Ming-Cheng Hsu
- Applicant: Taiwan Semiconductor Manufacturing CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: G01R1/067
- IPC: G01R1/067 ; G01R1/073

Abstract:
An apparatus and a method are disclosed herein. The apparatus is disclosed that includes a probe head and a circuit board. The probe head includes a metal housing and pins. The pins penetrate through the metal housing. The circuit board is configured to test a semiconductor device and includes a ground pad. The ground pad is electrically coupled between the metal housing and the circuit board.
Public/Granted literature
- US20150192608A1 Probe Card Public/Granted day:2015-07-09
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