Invention Grant
- Patent Title: Scanning micromirror with improved performance and related electronic device
-
Application No.: US14702833Application Date: 2015-05-04
-
Publication No.: US09678333B2Publication Date: 2017-06-13
- Inventor: Nir Goren
- Applicant: STMicroelectronics International N.V.
- Applicant Address: NL Schiphol
- Assignee: STMICROELECTRONICS INTERNATIONAL N.V.
- Current Assignee: STMICROELECTRONICS INTERNATIONAL N.V.
- Current Assignee Address: NL Schiphol
- Agency: Gardere Wynne Sewell LLP
- Priority: ITTO2014A0364 20140507
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; B81B3/00

Abstract:
A micromechanical mirror includes a mobile mass carrying a mirror element and provided in a body including semiconductor material. A driving structure is coupled to the mobile mass to cause a scanning movement thereof. The driving structure is configured to generate a combination of a two or more sinusoidal resonant modes in the micromechanical mirror at respective resonant frequencies. This combination approximates a scanning pattern of the mobile mass defined by a linear function which may, in particular, be a triangular shaped function.
Public/Granted literature
- US20150323782A1 SCANNING MICROMIRROR WITH IMPROVED PERFORMANCE AND RELATED ELECTRONIC DEVICE Public/Granted day:2015-11-12
Information query