Invention Grant
- Patent Title: Mirror drive device and driving method thereof
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Application No.: US14330415Application Date: 2014-07-14
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Publication No.: US09678335B2Publication Date: 2017-06-13
- Inventor: Takayuki Naono
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP2013-148569 20130717
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H02N2/10 ; H02N2/14 ; B81B3/00 ; H01L41/09

Abstract:
In a mirror drive device, a first actuator section and a second actuator section are arranged on both sides of a mirror supporting section that supports a mirror section so as to sandwich the mirror supporting section. The upper electrode of a first actuator section includes a first electrode section and a second electrode section, and an upper electrode of a second actuator section includes a third electrode section and a fourth electrode section. The arrangements of the electrode sections correspond to stress distribution of principal stresses in the piezoelectric body in resonant mode vibration, and in a piezoelectric body portion that corresponds to positions of the first electrode section and the third electrode section and a piezoelectric body portion that corresponds to positions of the second electrode section and the fourth electrode section, stresses in opposite directions to each other are generated.
Public/Granted literature
- US20150022871A1 MIRROR DRIVE DEVICE AND DRIVING METHOD THEREOF Public/Granted day:2015-01-22
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