Invention Grant
- Patent Title: Polymerizable fluoromonomer, fluoropolymer, resist material, and method of pattern formation
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Application No.: US14246720Application Date: 2014-04-07
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Publication No.: US09678426B2Publication Date: 2017-06-13
- Inventor: Haruhiko Komoriya , Shinichi Sumida , Kenjin Inomiya , Takashi Mori , Takamasa Kitamoto , Yusuke Kanto
- Applicant: Central Glass Company, Limited
- Applicant Address: JP Ube-shi
- Assignee: Central Glass Company, Limited
- Current Assignee: Central Glass Company, Limited
- Current Assignee Address: JP Ube-shi
- Agency: Crowell & Moring LLP
- Priority: JP2008-319027 20081215
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C09D133/16 ; G03F7/038 ; C08F20/28 ; C08F220/24 ; G03F7/039 ; G03F7/20 ; C08F220/18 ; C08F220/28

Abstract:
Disclosed is a polymerizable fluoromonomer represented by the following general formula (1). In the formula, R1 represents a hydrogen atom, methyl group, fluorine atom, or trifluoromethyl group. n is an integer of 0 or 1, and m is that of from 1 to (3+n). R2 and R3 each independently represents a hydrogen atom or a protective group. A resist containing a fluoropolymer obtained by polymerizing or copolymerizing the monomer is suitable for use in microfabrication by immersion exposure or by a double patterning process based on immersion exposure.
Public/Granted literature
- US20140221589A1 Polymerizable Fluoromonomer, Fluoropolymer, Resist Material, and Method of Pattern Formation Public/Granted day:2014-08-07
Information query
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