Invention Grant
- Patent Title: Resist underlayer film-forming composition containing copolymer that has triazine ring and sulfur atom in main chain
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Application No.: US15106861Application Date: 2014-12-10
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Publication No.: US09678427B2Publication Date: 2017-06-13
- Inventor: Hiroto Ogata , Takahiro Kishioka , Yoshiomi Hiroi , Tomoya Ohashi , Yuki Usui
- Applicant: NISSAN CHEMICAL INDUSTRIES, LTD.
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2013-271225 20131227
- International Application: PCT/JP2014/082705 WO 20141210
- International Announcement: WO2015/098525 WO 20150702
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/09 ; C09D167/02 ; C09D181/04 ; C09D167/00 ; H01L21/027

Abstract:
A resist underlayer film-forming composition containing a copolymer having a structural unit of Formula (1) and a structural unit of Formula (2), a cross-linkable compound, a cross-linking catalyst, and a solvent. wherein A is a divalent organic group containing a triazine ring, X1 is an —S— group or an —O— group, Q is a linear, branched, or cyclic hydrocarbon group having a carbon atom number of 1 to 15, the hydrocarbon group may have at least one sulfur atom or oxygen atom in a main chain and at least one hydroxy group as a substituent, n is 0 or 1, R1 and R2 are each independently a C1-3 alkylene group or a single bond, Z is a divalent group having at least one sulfur atom or oxygen atom, and when X1 is an —O— group, Z is a divalent group having at least one sulfur atom.
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