Invention Grant
- Patent Title: Optical assembly for increasing the etendue
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Application No.: US14828603Application Date: 2015-08-18
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Publication No.: US09678432B2Publication Date: 2017-06-13
- Inventor: Ingo Saenger , Christoph Hennerkes
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102013204443 20130314
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G21K1/06 ; G21K1/12

Abstract:
An optical system has a light source having an original etendue of less than 0.1 mm2 for an illumination system for projection lithography. An optical assembly serves for simultaneously increasing the etendue of a used emission of the light source. The optical assembly is embodied such that an increase in the etendue by at least a factor of 10 results. A component of the optical assembly that is impinged on is displaced relative to the light source such that an impingement region of the emission of the light source on the optical component of the optical assembly varies temporally.
Public/Granted literature
- US20150355552A1 OPTICAL ASSEMBLY FOR INCREASING THE ETENDUE Public/Granted day:2015-12-10
Information query
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