Invention Grant
- Patent Title: Dynamic pattern generator and method of toggling mirror cells of the dynamic pattern generator
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Application No.: US14614756Application Date: 2015-02-05
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Publication No.: US09679747B2Publication Date: 2017-06-13
- Inventor: Shao-Yu Li , Tsung-Hsin Yu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: H01J37/04
- IPC: H01J37/04 ; H01J37/317

Abstract:
The present disclosure provides a method for operating a dynamic pattern generator (DPG) having a mirror array. The method comprises receiving a clock signal, determining a time delay based on the period of the clock signal, determining a first clock signal for toggling a first group of mirror cells in the mirror array, determining a second clock signal, lagging behind the first clock signal by the time delay, for toggling a second group of mirror cells in the mirror array, toggling the first group of mirror cells in the mirror array in response to the first clock signal, and toggling the second group of the mirror cells in the mirror array in response to the second clock signal.
Public/Granted literature
- US20160148784A1 DYNAMIC PATTERN GENERATOR AND METHOD OF TOGGLING MIRROR CELLS OF THE DYNAMIC PATTERN GENERATOR Public/Granted day:2016-05-26
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