A semiconductor device includes an IGBT region with a bottom-body region on a front surface side of an IGBT drift region, an IGBT barrier region on a front surface side of the bottom-body region, and a top-body region on a front surface side of the IGBT barrier region. A diode region is include with a bottom-anode region on a front surface side of the diode drift region, a diode barrier region on a front surface side of the bottom-anode region, a top-anode region on a front surface side of the diode barrier region, and a pillar region extending from the front surface of the semiconductor substrate, piercing the top-anode region, and reaching the diode barrier region, and connected to the front surface electrode and the diode barrier region. An impurity concentration of the top-body region is lower than an impurity concentration of the bottom-anode region.