Invention Grant
- Patent Title: Circuit board formation using organic substrates
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Application No.: US14817378Application Date: 2015-08-04
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Publication No.: US09684237B2Publication Date: 2017-06-20
- Inventor: Hiroyuki Mori , Hirokazu Noma , Keishi Okamoto
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Stosch Sabo
- Priority: JP2014-166328 20140819
- Main IPC: H05K1/11
- IPC: H05K1/11 ; G03F7/00 ; G03F7/38 ; H05K3/42 ; H05K3/46

Abstract:
A method of forming a circuit board includes forming a conductive pattern on a substrate; forming a first negative resist on the substrate after formation of the conductive pattern; partially exposing the first negative resist on the surface of the conductive pattern to form a first via exposure portion; forming a second negative resist on the substrate after formation of the first via exposure portion; partially exposing the second negative resist on the first via exposure portion to form a second via exposure portion larger than the first via exposure portion; developing the first negative resist and the second negative resist after formation of the second via exposure portion to form a via opening reaching the conductive pattern; and filling the via opening with a conductive material.
Public/Granted literature
- US20160057857A1 CIRCUIT BOARD FORMATION USING ORGANIC SUBSTRATES Public/Granted day:2016-02-25
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