- Patent Title: Laser-induced forming and transfer of shaped metallic interconnects
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Application No.: US15178930Application Date: 2016-06-10
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Publication No.: US09685349B2Publication Date: 2017-06-20
- Inventor: Scott A. Mathews , Iyoel Beniam , Alberto Piqué
- Applicant: The United States of America, as represented by the Secretary of the Navy
- Applicant Address: US DC Washington
- Assignee: The United States of America, as represented by the Secretary of the Navy
- Current Assignee: The United States of America, as represented by the Secretary of the Navy
- Current Assignee Address: US DC Washington
- Agency: US Naval Research Laboratory
- Agent Stephen T. Hunnius
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/48 ; H01L21/768 ; H01L23/00

Abstract:
A method of forming and transferring shaped metallic interconnects, comprising providing a donor substrate comprising an array of metallic interconnects, using a laser system to prepare the metallic interconnects, forming shaped metallic interconnects, and transferring the shaped metallic interconnect to an electrical device. An electronic device made from the method of providing a donor ribbon, wherein the donor ribbon comprises an array of metal structures and a release layer on a donor substrate, providing a stencil to the metal structures on the donor substrate, applying a laser pulse through the donor substrate to the metal structures, and directing the metal structures to an electronic device.
Public/Granted literature
- US20170103902A1 Laser-Induced Forming and Transfer of Shaped Metallic Interconnects Public/Granted day:2017-04-13
Information query
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