Invention Grant
- Patent Title: Silicon-on-insulator integrated circuit devices with body contact structures and methods for fabricating the same
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Application No.: US14478211Application Date: 2014-09-05
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Publication No.: US09685364B2Publication Date: 2017-06-20
- Inventor: Guan Huei See , Rui Tze Toh , Shaoqiang Zhang , Purakh Raj Verma
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Lorenz & Kopf, LLP
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L21/265 ; H01L29/66 ; H01L29/06 ; H01L29/78 ; H01L21/308 ; H01L23/485

Abstract:
Silicon-on-insulator integrated circuits including body contact structures and methods for fabricating the same are disclosed. A method for fabricating a silicon-on-insulator integrated circuit includes filling a plurality of first and second shallow isolation trenches with an insulating material to form plurality of first and second shallow trench isolation (STI) structures, the plurality of second shallow isolation trenches having doped regions therebeneath, and forming a gate structure over the semiconductor layer that includes a first portion disposed over and parallel to at least two of the plurality of second STI structures and a second portion disposed in between the at least two of the plurality of second STI structures. The method further includes forming contact plugs to a body contact or gate region of the semiconductor layer. The body contact region includes a portion of the semiconductor layer between at least one of the plurality of first STI structures and at least one of the plurality of second STI structures.
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