Invention Grant
- Patent Title: Back-illuminated integrated imaging device with simplified interconnect routing
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Application No.: US14847391Application Date: 2015-09-08
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Publication No.: US09685475B2Publication Date: 2017-06-20
- Inventor: Francois Guyader , Jean-Pierre Oddou , Stephane Allegret-Maret , Mickael Gros-Jean
- Applicant: STMicroelectronics (Crolles 2) SAS
- Applicant Address: FR Crolles
- Assignee: STMICROELECTRONICS (CROLLES 2) SAS
- Current Assignee: STMICROELECTRONICS (CROLLES 2) SAS
- Current Assignee Address: FR Crolles
- Agency: Gardere Wynne Sewell LLP
- Priority: FR1459541 20141006
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/0232 ; H01L27/146 ; H01L27/12

Abstract:
A back-illuminated integrated imaging device is formed from a semiconductor substrate including a zone of pixels bounded by capacitive deep trench isolations. A peripheral zone is located outside the zone of pixels. A continuous electrically conductive layer forms, in the zone of pixels, an electrode in a trench for each capacitive deep trench isolation, and forms, in the peripheral zone, a redistribution layer for electrically coupling the electrode to a biasing contact pad. The electrode is located in the trench between a trench dielectric and at least one material for filling the trench.
Public/Granted literature
- US20160099278A1 BACK-ILLUMINATED INTEGRATED IMAGING DEVICE WITH SIMPLIFIED INTERCONNECT ROUTING Public/Granted day:2016-04-07
Information query
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