Invention Grant
- Patent Title: Method and apparatus for physical confinement of a liquid meniscus over a semiconductor wafer
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Application No.: US14058792Application Date: 2013-10-21
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Publication No.: US09694453B2Publication Date: 2017-07-04
- Inventor: Enrico Magni , Eric Lenz
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: B23P17/04
- IPC: B23P17/04 ; B08B3/08 ; H01L21/67

Abstract:
Apparatus, methods and systems for physically confining a liquid medium applied over a semiconductor wafer include a chemical head. The chemical head including multiple first return conduits formed from a first flat region in a head surface and multiple second return conduits formed from a second flat region in the head surface. The second flat region being disposed immediately adjacent to the first flat region and the second flat region being in a plane substantially parallel to and offset from the first flat region. At least one of the first return conduits and the second return conduits being formed at a first angle relative to the head surface and the first angle being greater than about 20 degrees to a meniscus plane normal.
Public/Granted literature
- US20140041226A1 Method and Apparatus for Physical Confinement of a Liquid Meniscus Over a Semiconductor Wafer Public/Granted day:2014-02-13
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