Invention Grant
- Patent Title: Polishing method of polishing a substrate
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Application No.: US15386624Application Date: 2016-12-21
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Publication No.: US09694467B2Publication Date: 2017-07-04
- Inventor: Masaya Seki , Tetsuji Togawa
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2013-017192 20130131
- Main IPC: B24B21/00
- IPC: B24B21/00 ; B24B9/06

Abstract:
A polishing method of polishing a substrate includes moving a stopper from a predetermined initial position by a distance corresponding to a target polishing amount of a substrate. The method further includes pressing a polishing tool against the substrate by a pressing member while rotating the substrate. The method further includes polishing the substrate until a positioning member which moves together with the pressing member is brought into contact with the stopper.
Public/Granted literature
- US20170100813A1 POLISHING APPARATUS AND POLISHING METHOD Public/Granted day:2017-04-13
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