Transport device and transport method for transporting a fragile object
Abstract:
A transport device and a transport method for transporting a fragile object, in particular a semiconductor wafer, a glass panel, a solar module, etc., are provided. The transport device comprises at least two coils configured to drive the object along a predetermined movement path, and a control unit configured to control a movement of the object along the predetermined movement path. The control unit is further configured to base the control of the movement of the object on at least a third order setpoint profile. The control unit is also configured to generate the third order setpoint profile for at least two coils in a synchronized manner.
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