Invention Grant
- Patent Title: Transport device and transport method for transporting a fragile object
-
Application No.: US14957710Application Date: 2015-12-03
-
Publication No.: US09694986B2Publication Date: 2017-07-04
- Inventor: Rob Bierbooms
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- Priority: EP14196446 20141205
- Main IPC: B65G21/20
- IPC: B65G21/20 ; B65G43/00 ; H01L21/677 ; B65G54/02

Abstract:
A transport device and a transport method for transporting a fragile object, in particular a semiconductor wafer, a glass panel, a solar module, etc., are provided. The transport device comprises at least two coils configured to drive the object along a predetermined movement path, and a control unit configured to control a movement of the object along the predetermined movement path. The control unit is further configured to base the control of the movement of the object on at least a third order setpoint profile. The control unit is also configured to generate the third order setpoint profile for at least two coils in a synchronized manner.
Public/Granted literature
- US20160159578A1 Transport Device and Transport Method for Transporting a Fragile Object Public/Granted day:2016-06-09
Information query
IPC分类: