Invention Grant
- Patent Title: Physical quantity sensor, method for manufacturing physical quantity sensor, electronic device, and moving body
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Application No.: US14937108Application Date: 2015-11-10
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Publication No.: US09695041B2Publication Date: 2017-07-04
- Inventor: Shinichi Kamisuki
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-229559 20141112
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B81C1/00
Abstract:
A physical quantity sensor includes a supporting substrate, an acceleration detecting element that is mounted on the supporting substrate, and a sealing substrate that is bonded to the supporting substrate, and seals the acceleration detecting element, in which a notch portion is formed in a portion of a bonded face to the supporting substrate, in the sealing substrate, and a filling material that is configured by a material which is different from a material configuring the sealing substrate, is arranged in the notch portion.
Public/Granted literature
Information query
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