Invention Grant
- Patent Title: Deposition mask, method of manufacturing deposition mask, and method of manufacturing display apparatus
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Application No.: US14947714Application Date: 2015-11-20
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Publication No.: US09695522B2Publication Date: 2017-07-04
- Inventor: Sungsoon Im , Kyu H. Hwang , Jaesik Kim , Minho Moon , Youngmin Moon , Soonchul Chang , Taewook Kang
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2014-0163717 20141121; KR10-2015-0155870 20151106
- Main IPC: C25D21/12
- IPC: C25D21/12 ; B05B15/04 ; C25D1/10 ; B05C21/00 ; H01L51/00
Abstract:
A deposition mask including a mask body including a plurality of pattern holes; a plurality of protrusions protruding from the mask body; and a plurality of grooves formed in the mask body. A grain size of the mask body is in arrange of about 10 μm to about 1000 μm, and a difference between a maximum height of the plurality of protrusions and a maximum height of the plurality of grooves is equal to or less than 0.5 μm.
Public/Granted literature
- US20160145762A1 DEPOSITION MASK, METHOD OF MANUFACTURING DEPOSITION MASK, AND METHOD OF MANUFACTURING DISPLAY APPARATUS Public/Granted day:2016-05-26
Information query
