Invention Grant
- Patent Title: Pump device and method for controlling the same
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Application No.: US14378743Application Date: 2012-02-16
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Publication No.: US09695815B2Publication Date: 2017-07-04
- Inventor: Yuji Nonomura , Sachie Suzuki , Ryuji Itoyama , Akhiro Yamanaka
- Applicant: Yuji Nonomura , Sachie Suzuki , Ryuji Itoyama , Akhiro Yamanaka
- Applicant Address: JP Miyazaki
- Assignee: Ulvac Kiko, Inc.
- Current Assignee: Ulvac Kiko, Inc.
- Current Assignee Address: JP Miyazaki
- Agency: McNees Wallace & Nurick LLC
- International Application: PCT/JP2012/001022 WO 20120216
- International Announcement: WO2013/121462 WO 20130822
- Main IPC: F04B49/20
- IPC: F04B49/20 ; F04B43/02 ; F04B43/04 ; F04B45/04 ; F04B45/047 ; F04B49/06 ; F04B49/10 ; F04B53/10

Abstract:
A pump device and method for stabilizing a suction flow rate irrespective of an outside air temperature. The method includes: outputting a drive signal for driving a motor at a rotation speed for discharging gas of the reference flow rate from the suction port of the pump main body; measuring a temperature of gas discharged from the suction port or a temperature of the pump main body by a temperature sensor attached to the pump main body; calculating an actual flow rate of the gas discharged from the suction port based on a temperature signal relating to the temperature of the gas included in an output of the temperature sensor; and correcting the drive signal such that the actual flow rate equals the reference flow rate and outputting the corrected drive signal to the motor.
Public/Granted literature
- US20160003251A1 PUMP DEVICE AND METHOD FOR CONTROLLING THE SAME Public/Granted day:2016-01-07
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