Invention Grant
- Patent Title: Optical scanning probe
-
Application No.: US14387552Application Date: 2013-03-28
-
Publication No.: US09696146B2Publication Date: 2017-07-04
- Inventor: Patrick Blanckaert , Frank Thys , Raf Nysen , Geert Vandenhoudt
- Applicant: NIKON METROLOGY NV
- Applicant Address: BE Heverlee
- Assignee: NIKON METROLOGY NV
- Current Assignee: NIKON METROLOGY NV
- Current Assignee Address: BE Heverlee
- Agency: Amster, Rothstein & Ebenstein LLP
- Priority: EP12181396 20120822
- International Application: PCT/EP2013/056700 WO 20130328
- International Announcement: WO2013/144293 WO 20131003
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G01B11/25

Abstract:
The present invention relates to a scanning probe (100) for the dimensional acquisition of an object (400) by irradiating the object (400) with light and detecting reflected light comprising: a detection unit (120) comprising an imaging sensor (122) and a sensor lens assembly (124) for detecting the reflected light, a light projecting unit (141) comprising a light source (142) for generating light, and source optics (145) for focusing the light, and light plane generating optics (143) for generating a light plane (149) for irradiating the object, and an adjustment mechanism (155) comprised in the light projecting unit (141), for adjusting the position or orientation of the light plane relative to the detection unit. It further relates to a method for assembly of a scanning probe (100).
Public/Granted literature
- US20150043008A1 OPTICAL SCANNING PROBE Public/Granted day:2015-02-12
Information query