Invention Grant
- Patent Title: Vibrating element, sensor unit, electronic apparatus, and method for manufacturing vibrating element
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Application No.: US13847644Application Date: 2013-03-20
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Publication No.: US09696156B2Publication Date: 2017-07-04
- Inventor: Keiji Nakagawa , Ryuta Nishizawa
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-076471 20120329
- Main IPC: G01C19/00
- IPC: G01C19/00 ; G01P3/44 ; G01P9/00 ; G01P15/08 ; G01C19/5607 ; G01C19/5621
Abstract:
An vibrating gyro device includes a base, drive vibrating arms extending from one end of the base, and detection vibrating arms extending from the other end of the base that faces away from the one end, and an adjustment film is provided on each of the drive vibrating arms in an area close to the base.
Public/Granted literature
- US20130255379A1 VIBRATING ELEMENT, SENSOR UNIT, ELECTRONIC APPARATUS, AND METHOD FOR MANUFACTURING VIBRATING ELEMENT Public/Granted day:2013-10-03
Information query
