Gyro sensor and composite sensor comprising gyro sensor
Abstract:
In a gyro sensor, two detection weights are placed in an outer drive weight to be arranged in an x-axis direction and coupled to each other via a coupling spring. By thus coupling the two detection weights via the coupling spring, it is possible to separate an in-phase-mode resonant frequency fin and an anti-phase-mode resonant frequency fanti from each other. As a result, it is possible to provide the gyro sensor which can suppress an output error on receiving an impact and perform more precise angular velocity detection.
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