Invention Grant
- Patent Title: Spectral data processing apparatus, spectral data processing method, and recording medium
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Application No.: US14307913Application Date: 2014-06-18
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Publication No.: US09696203B2Publication Date: 2017-07-04
- Inventor: Kota Iwasaki , Hidetoshi Tsuzuki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A. Inc., IP Division
- Priority: JP2013-129224 20130620; JP2014-099899 20140513
- Main IPC: G01J3/28
- IPC: G01J3/28

Abstract:
A spectral data processing apparatus includes an analyzer configured to perform principal component analysis of spectral data acquired for each of a plurality of regions of a sample, wherein the analyzer obtains an eigenvector by performing the principal component analysis of first spectral data of a first region out of the plurality of regions, and performs the principal component analysis of second spectral data of a second region different from the first region out of the plurality of regions using the obtained eigenvector.
Public/Granted literature
- US20140379306A1 SPECTRAL DATA PROCESSING APPARATUS, SPECTRAL DATA PROCESSING METHOD, AND RECORDING MEDIUM Public/Granted day:2014-12-25
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