Systems and methods are provided that may be implemented to improve accuracy of relative humidity (RH) determination from dielectric sensing material-based RH sensors, e.g., by decreasing shift and drift effects and compensating for dielectric material aging to improve RH sensor accuracy. The disclosed systems and methods may be implemented to improve RH sensing accuracy by correcting humidity-sensitive electrical parameters (e.g., capacitance, effective resistance, etc.) based on other other measured sensor electrical operating characteristics (e.g., such as real time sensor circuit phase angle) and/or selection of sensor electrical parameters (e.g., such as optimized operating frequency) that are employed for sensing changes in dielectric constant of a dielectric material-based RH sensor.