- Patent Title: Capacitive microelectromechanical sensor with self-test capability
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Application No.: US14877257Application Date: 2015-10-07
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Publication No.: US09696375B2Publication Date: 2017-07-04
- Inventor: Lasse Aaltonen , Jouni Erkkilä
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Squire Patton Boggs (US) LLP
- Priority: FI20145894 20141013
- Main IPC: G01R31/3187
- IPC: G01R31/3187 ; G01R31/28 ; G01P15/125 ; G01P21/00

Abstract:
A capacitive sensor that includes at least one capacitive element and a switched-capacitor readout circuit part for detecting at least one signal capacitance that results from motions of the capacitive element. The self-test bias voltage of the actuation circuit part is coupled to the capacitive element during a first period that is synchronized to the front end reset period and occurs when the self-test of the capacitive sensor is enabled by the self-test controller.
Public/Granted literature
- US20160103174A1 CAPACITIVE MICROELECTROMECHANICAL SENSOR WITH SELF-TEST CAPABILITY Public/Granted day:2016-04-14
Information query
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