Invention Grant
- Patent Title: Hybrid energy conversion and processing detector
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Application No.: US14688081Application Date: 2015-04-16
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Publication No.: US09696435B2Publication Date: 2017-07-04
- Inventor: Alexander Jozef Gubbens , Paul Mooney , Matthew Lent
- Applicant: Gatan, Inc.
- Applicant Address: US PA Warrendale
- Assignee: GATAN, INC.
- Current Assignee: GATAN, INC.
- Current Assignee Address: US PA Warrendale
- Agency: Snyder, Clark, Lesch & Chung, LLP
- Main IPC: G01T1/20
- IPC: G01T1/20 ; H01J37/244

Abstract:
There is disclosed a hybrid arrangement of more than one electron energy conversion mechanism in a detector arranged physically such that the electron image can be acquired from both energy converters in such a manner that selected high-illumination parts of the image can be imaged with an indirectly coupled scintillator detector and the remainder of the image acquired with the high-sensitivity/direct electron portion of the detector without readjustments in the beam position or mechanical positioning of the detector parts.Further, a mechanism to allow dynamically switchable or simultaneous linear and counted signal processing from each pixel of the image so that high-illumination areas can be acquired linearly without the severe dose rate limitation of counting and low-illumination regions can be acquired with counting, the switchover point determined by the dose rate at which signal quality breaks even between linear and counting modes.
Public/Granted literature
- US20150301196A1 HYBRID ENERGY CONVERSION AND PROCESSING DETECTOR Public/Granted day:2015-10-22
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