Invention Grant
- Patent Title: Reduction of thermo-optic effects in silicon photonics
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Application No.: US14697169Application Date: 2015-04-27
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Publication No.: US09696487B2Publication Date: 2017-07-04
- Inventor: Sung-Joo Ben Yoo
- Applicant: The Regents of the University of California
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: Park, Vaughan, Fleming & Dowler LLP
- Main IPC: G02B6/12
- IPC: G02B6/12 ; G02B6/122 ; G02B1/02 ; G02B6/132 ; C23C14/08 ; C23C14/58 ; C23C14/00

Abstract:
A method and system are described for reducing a thermo-optic effect in silicon photonics. In described embodiments, the system comprises a silicon photonic device with a silicon core that includes a cladding layer comprising titanium adjacent to the silicon core. In described embodiments, the method comprises providing a silicon core and depositing a cladding layer adjacent to the silicon photonic core, wherein the cladding layer comprises titanium.
Public/Granted literature
- US20150309253A1 REDUCTION OF THERMO-OPTIC EFFECTS IN SILICON PHOTONICS Public/Granted day:2015-10-29
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