Invention Grant
- Patent Title: Position manipulator for an optical component
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Application No.: US13764573Application Date: 2013-02-11
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Publication No.: US09696518B2Publication Date: 2017-07-04
- Inventor: Stefan Hembacher
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102012202170 20120214
- Main IPC: G02B7/182
- IPC: G02B7/182 ; G03F7/20 ; G02B7/22

Abstract:
A device for adjustably positioning an optical component includes a holding unit, which is which at least partly composed of a magnetostrictive material, and a mechanism for generating a magnetic field having a predetermined directional and amplitude distribution in the region of the holding unit. The holding unit has, in a predefined direction, an expansion which can be varied by a specific absolute value by the effect of the magnetic field.
Public/Granted literature
- US20130242282A1 POSITION MANIPULATOR FOR AN OPTICAL COMPONENT Public/Granted day:2013-09-19
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