Micro-electro-mechanical system (MEMS) mirror devices and manufacturing methods thereof. The device comprising a hinge layer having orthogonal tilt and roll hinges connecting inner and outer platforms such that the inner platform has bi-directional rotation. An electrode layer connected beneath the hinge layer controls rotation of the platforms. A mirror layer above the hinge layer comprises a mirror connected to the inner platform via a pedestal and fixed membrane connected to the hinge layer but detached from the mirror. An anchor temporarily reduces movement of the outer platform during fabrication. In a fabrication state, the anchor anchors the outer platform to the mirror layer's fixed membrane. In a post-fabrication state, a gap releases the outer platform.