Invention Grant
- Patent Title: Mirror for the EUV wavelength range, method for producing such a mirror, and projection exposure apparatus comprising such a mirror
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Application No.: US14478535Application Date: 2014-09-05
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Publication No.: US09696632B2Publication Date: 2017-07-04
- Inventor: Peter Huber , Gisela Von Blanckenhagen
- Applicant: Carl Zeiss SMT GMBH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102012203633 20120308
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03F7/20 ; B82Y10/00 ; G21K1/06 ; C23C14/06 ; C23C14/35 ; G02B5/08

Abstract:
A mirror (1) for the EUV wavelength range having a reflectivity of greater than 40% for at least one angle of incidence of between 0° and 25° includes a substrate (S) and a layer arrangement, wherein the layer arrangement has at least one non-metallic individual layer (B, H, M), and wherein the non-metallic individual layer (B, H, M) has a doping with impurity atoms of between 10 ppb and 10%, in particular between 100 ppb and 0.1%, providing the non-metallic individual layer (B, H, M) with a charge carrier density of greater than 6*1010 cm−3 and/or an electrical conductivity of greater than 1*10−3 S/m, in particular with a charge carrier density of greater than 6*1013 cm−3 and/or an electrical conductivity of greater than 1 S/m.
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