Invention Grant
- Patent Title: Fluid control apparatus and thermal sensor installation structure with respect to fluid control apparatus
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Application No.: US14772828Application Date: 2014-02-17
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Publication No.: US09696727B2Publication Date: 2017-07-04
- Inventor: Jun Yokota , Takahiro Yoshida , Thanh T. Nguyen , Takahiro Matsuda
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka-shi
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka-shi
- Agency: Locke Lord LLP
- Priority: JP2013-046867 20130308
- International Application: PCT/JP2014/053609 WO 20140217
- International Announcement: WO2014/136557 WO 20140912
- Main IPC: F16K31/02
- IPC: F16K31/02 ; G05D7/03 ; F16K37/00 ; F16K27/00 ; G01K13/02 ; G01M3/00 ; G05D23/22

Abstract:
The present invention provides a fluid control apparatus which allows installation of a thermal sensor for temperature control by a simple work by an effective utilization of a space in the fluid control apparatus, and a thermal sensor installation structure with respect to the fluid control apparatus. The fluid control apparatus 1 includes a first fluid control instrument 3 and a second fluid control instrument 4 adjacent to each other and the thermal sensor 17 configured to measure a temperature of a fluid flowing in the first fluid control instrument 3. The fluid control apparatus 1 further includes a supporting member 19 configured to support the thermal sensor 17 attached to the second fluid control instrument 4.
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