Invention Grant
- Patent Title: Versatile system for self-aligning deposition equipment
-
Application No.: US13859605Application Date: 2013-04-09
-
Publication No.: US09698006B2Publication Date: 2017-07-04
- Inventor: Martin Garcia
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Tuenlap D. Chan; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L21/02
- IPC: H01L21/02 ; C23C16/52 ; H01L21/67 ; C23C16/455 ; H01L21/68

Abstract:
The present invention provides a system (100) for aligning a dispensing apparatus (110) utilized within a semiconductor deposition chamber (102). A stationary reference apparatus (106) is disposed along the bottom of the deposition chamber. A self-alignment support system (122), comprising one or more support components (124), is intercoupled between the dispensing apparatus and a deposition system exterior component (112). The self-alignment support system is adapted to facilitate and secure repositioning of the dispensing apparatus responsive to pressure applied to the dispensing surface (114) thereof. A non-yielding offset component (126) is placed upon a first surface (108) of the stationary reference apparatus. The dispensing surface of the dispensing apparatus is engaged with the offset component, and pressure is applied to the dispensing apparatus via the offset component until a desired alignment is achieved.
Public/Granted literature
- US20130228125A1 VERSATILE SYSTEM FOR SELF-ALIGNING DEPOSITION EQUIPMENT Public/Granted day:2013-09-05
Information query
IPC分类: