Invention Grant
- Patent Title: Strained structure of a p-type field effect transistor
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Application No.: US12984703Application Date: 2011-01-05
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Publication No.: US09698054B2Publication Date: 2017-07-04
- Inventor: Chun-Fai Cheng , Ka-Hing Fung , Li-Ping Huang , Wei-Yuan Lu
- Applicant: Chun-Fai Cheng , Ka-Hing Fung , Li-Ping Huang , Wei-Yuan Lu
- Applicant Address: TW
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW
- Agency: Hauptman Ham, LLP
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8234 ; H01L21/8238 ; H01L29/78 ; H01L29/49 ; H01L29/51

Abstract:
In a p-type field effect transistor, a pair of spacers are formed over the top surface of a substrate. A channel recess cavity includes an indentation in the substrate top surface between the pair of spacers. A gate stack has a bottom portion in the channel recess cavity and a top portion extending outside the channel recess cavity. A source/drain (S/D) recess cavity has a bottom surface and sidewalls below the substrate top surface. The S/D recess cavity has a portion extending below the gate stack. A strained material is filled the S/D recess cavity.
Public/Granted literature
- US20120091540A1 STRAINED STRUCTURE OF A P-TYPE FIELD EFFECT TRANSISTOR Public/Granted day:2012-04-19
Information query
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