Invention Grant
- Patent Title: Die bonding apparatus
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Application No.: US14600324Application Date: 2015-01-20
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Publication No.: US09698117B2Publication Date: 2017-07-04
- Inventor: Yongdae Ha , Jaeryoung Lee , Chulmin Kim , Yisung Hwang , Teaseog Um , Yongjin Jung
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2014-0015002 20140210
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/683 ; H01L21/67

Abstract:
The die bonding apparatus including a transferring unit, a loading member loading a substrate to the transferring unit, an unloading member unloading the substrate from the transferring unit, a wafer holder supporting a wafer providing dies, and a bonding member picking up one of the dies from the wafer and bonding the picked-up die to the substrate loaded on the transferring unit by pressuring the picked-up die against the substrate using a gas may be provided.
Public/Granted literature
- US20150228612A1 DIE BONDING APPARATUS Public/Granted day:2015-08-13
Information query
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