• Patent Title: Semiconductor device and method for forming the same
  • Application No.: US14181039
    Application Date: 2014-02-14
  • Publication No.: US09698142B2
    Publication Date: 2017-07-04
  • Inventor: Jung Sam Kim
  • Applicant: SK HYNIX INC.
  • Applicant Address: KR Icheon
  • Assignee: SK HYNIX INC.
  • Current Assignee: SK HYNIX INC.
  • Current Assignee Address: KR Icheon
  • Priority: KR10-2013-0053895 20130513
  • Main IPC: H01L27/07
  • IPC: H01L27/07 H01L27/06
Semiconductor device and method for forming the same
Abstract:
A semiconductor device includes a semiconductor substrate including a pad region and a peripheral region, a first buffer layer formed to include a capacitor over the semiconductor substrate in the pad region, a second buffer layer formed to include a first contact pad over the first buffer layer, and a third buffer layer formed to include a second contact pad over the first contact pad. The semiconductor device, by additionally forming a buffer layer at a lower part in the pad region, reduces a stress caused by wire bonding. Thus, an applied stress to a lower structure in the pad region is also reduced. As a result, the buffer layer prevents formation of an electrical bridge between the pad region and the peripheral region.
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