Invention Grant
- Patent Title: Magnetic tunnel junction encapsulation using hydrogenated amorphous semiconductor material
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Application No.: US14982540Application Date: 2015-12-29
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Publication No.: US09698339B1Publication Date: 2017-07-04
- Inventor: Anthony J. Annunziata , Marinus Hopstaken , Chandrasekara Kothandaraman , JungHyuk Lee , Deborah A. Neumayer , Jeong-Heon Park
- Applicant: International Business Machines Corporation , Samsung Electronics Co., Ltd.
- Applicant Address: US NY Armonk KR Suwon-si, Gyeonggi-Do
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: US NY Armonk KR Suwon-si, Gyeonggi-Do
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/08 ; H01L43/12

Abstract:
Embodiments are directed to an electromagnetic memory device having a memory cell and an encapsulation layer formed over the memory cell. The memory cell may include a magnetic tunnel junction (MTJ), and the encapsulation layer may be formed from a layer of hydrogenated amorphous silicon. Amorphous silicon improves the coercivity of the MTJ but by itself is conductive. Adding hydrogen to amorphous silicon passivates dangling bonds of the amorphous silicon, thereby reducing the ability of the resulting hydrogenated amorphous silicon layer to provide a parasitic current path to the MTJ. The hydrogenated amorphous silicon layer may be formed using a plasma-enhanced chemical vapor deposition, which can be tuned to enable a hydrogen level of approximately 10 to approximately 20 percent. By keeping subsequent processing operations at or below about 400 Celsius, the resulting layer of hydrogenated amorphous silicon can maintain its hydrogen level of approximately 10 to 20 percent.
Public/Granted literature
- US20170186943A1 MAGNETIC TUNNEL JUNCTION ENCAPSULATION USING HYDROGENATED AMORPHOUS SEMICONDUCTOR MATERIAL Public/Granted day:2017-06-29
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