- Patent Title: Method of and apparatus for supply and recovery of target material
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Application No.: US14151600Application Date: 2014-01-09
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Publication No.: US09699876B2Publication Date: 2017-07-04
- Inventor: Georgiy Vaschenko , Peter Baumgart , Jeffrey Gacutan , Martin Algots , Theodosios Syrpis , Chirag Rajyaguru , Sanjeev Seshagiri
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS, B.V.
- Current Assignee: ASML NETHERLANDS, B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Arent Fox LLP
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G01K5/00 ; H05G2/00
Abstract:
An EUV light source target material handling system is disclosed which may comprise a droplet generator having a target material reservoir in which the target material may be replenished while a nozzle portion of the droplet generator is maintained at temperature. Also disclosed is a system for selectively draining spent target material.
Public/Granted literature
- US20140261761A1 METHOD OF AND APPARATUS FOR SUPPLY AND RECOVERY OF TARGET MATERIAL Public/Granted day:2014-09-18
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