Invention Grant
- Patent Title: High purity synthetic silica and items such as semiconductor jigs manufactured therefrom
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Application No.: US13809231Application Date: 2011-07-08
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Publication No.: US09701561B2Publication Date: 2017-07-11
- Inventor: Richard Benjamin Coapes , Alan Mundy , Ian George Sayce
- Applicant: Richard Benjamin Coapes , Alan Mundy , Ian George Sayce
- Applicant Address: GB Tyne & Wear
- Assignee: Heraeus Quartz UK Ltd.
- Current Assignee: Heraeus Quartz UK Ltd.
- Current Assignee Address: GB Tyne & Wear
- Agency: Howson & Howson, LLP
- Priority: GB1011582.2 20100709
- International Application: PCT/EP2011/061683 WO 20110708
- International Announcement: WO2012/004398 WO 20120112
- Main IPC: C03B19/14
- IPC: C03B19/14 ; C03C3/06

Abstract:
Hollow ingots of transparent synthetic vitreous silica glass of external diameter greater than 400 mm and internal diameter greater than 300 mm are disclosed. The ingots are substantially free from bubbles or inclusions greater than 100 μm in diameter, have no more than 100 ppB of any individual metallic impurity, and have chlorine concentration less than 5 ppM. Also disclosed are methods for producing such ingots, in which a porous soot body of density greater than 0.4 g/cm3 is deposited on an oxidation resistant mandrel. The soot body is dehydrated on a mandrel comprising graphite, carbon fiber reinforced carbon, silicon carbide, silicon impregnated silicon carbide, silicon carbide-coated graphite or vitreous silica, either under vacuum or in the presence of a reducing gas, and then sintered to transparent pore-free glass under vacuum or in an atmosphere of helium.
Public/Granted literature
- US20130115391A1 HIGH PURITY SYNTHETIC SILICA AND ITEMS SUCH AS SEMICONDUCTOR JIGS MANUFACTURED THEREFROM Public/Granted day:2013-05-09
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