Invention Grant
- Patent Title: Pressure sensor and method for manufacturing the same
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Application No.: US14734121Application Date: 2015-06-09
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Publication No.: US09702038B2Publication Date: 2017-07-11
- Inventor: Tomohide Minami
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2014-133267 20140627
- Main IPC: G01L21/12
- IPC: G01L21/12 ; C23C14/58

Abstract:
Disclosed is a pressure sensor that outputs a temperature change caused in an electrical resistor according to a pressure of a gas, as a resistance change in the electrical resistor. The pressure sensor includes: a base substrate including a recess formed therein, a floating film formed on the base substrate, a heater formed on a surface of the floating film and configured to heat the floating film when a current flows therein, and a temperature sensor formed as the electrical resistor on the surface of the floating film. The temperature sensor changes a voltage drop with respect to a current flowing therein according to the temperature of the floating film.
Public/Granted literature
- US20150377812A1 PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2015-12-31
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