Invention Grant
- Patent Title: Super-hydrophobic thin film and method for preparing the same
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Application No.: US14505793Application Date: 2014-10-03
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Publication No.: US09702040B2Publication Date: 2017-07-11
- Inventor: Jeongeon Han , Yoonseok Choi , Su Bong Jin , Jun Suck Lee
- Applicant: RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY
- Applicant Address: KR Suwon-si
- Assignee: Research & Business Foundation Sungkyunkwan University
- Current Assignee: Research & Business Foundation Sungkyunkwan University
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2014-0022202 20140225
- Main IPC: C23C16/40
- IPC: C23C16/40 ; C23C16/509
Abstract:
A super-hydrophobic thin film and a method of preparing the same are provided. The method of preparing the super-hydrophobic thin film involves forming a super-hydrophobic thin film by plasma enhanced chemical vapor deposition (PECVD) on a substrate by using a precursor and a hydrogen gas.
Public/Granted literature
- US20150240363A1 SUPER-HYDROPHOBIC THIN FILM AND METHOD FOR PREPARING THE SAME Public/Granted day:2015-08-27
Information query
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