Invention Grant
- Patent Title: Use of a full width array imaging sensor to measure real time film thicknesses on film manufacturing equipment
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Application No.: US14743491Application Date: 2015-06-18
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Publication No.: US09702689B2Publication Date: 2017-07-11
- Inventor: Paul S. Bonino , Robert P. Herloski , Jason M. LeFevre
- Applicant: XEROX CORPORATION
- Applicant Address: US CT Norwalk
- Assignee: Xerox Corporation
- Current Assignee: Xerox Corporation
- Current Assignee Address: US CT Norwalk
- Agency: MH2 Technology Law Group LLP
- Main IPC: G01B11/06
- IPC: G01B11/06

Abstract:
A method for providing film-thickness analysis with a spectrophotometer includes configuring an illuminator to emit a light beam at a film deposited on a substrate surface, configuring a linear sensor to receive light reflecting off the deposited film on the substrate surface via a gradient index lens and a linear variable filter, and configuring a processor to determine thickness of the film based on spectral reflectivity of the film received from the linear sensor.
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