Invention Grant
- Patent Title: Angular velocity sensor
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Application No.: US14432755Application Date: 2013-10-11
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Publication No.: US09702696B2Publication Date: 2017-07-11
- Inventor: Yasunobu Kobayashi
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2012-231384 20121019
- International Application: PCT/JP2013/006080 WO 20131011
- International Announcement: WO2014/061247 WO 20140424
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5656 ; G01C19/574

Abstract:
An angular velocity sensor includes a fixing section to be fixed to an object, first and second connection beams each having one end connected to the fixing section, first and second double-end-supported beams, first and second driving electrodes to vibrate the supported beams, and first and second sensing electrodes to detect vibrations of the supported beams. The first supported beam has its ends connected to second ends of the first and second connection beams. The first supported beam, the first connection beam, and the second connection beam surround one side surface of the fixing section. The second supported beam has its ends connected to second ends of the first and second connection beams. The second double-end-supported beam, the first connection beam, and the second connection beam surround another side surface of the fixing section opposite the one side surface of the fixing section.
Public/Granted literature
- US20150253139A1 ANGULAR VELOCITY SENSOR Public/Granted day:2015-09-10
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