Angular velocity sensor
Abstract:
An angular velocity sensor includes a fixing section to be fixed to an object, first and second connection beams each having one end connected to the fixing section, first and second double-end-supported beams, first and second driving electrodes to vibrate the supported beams, and first and second sensing electrodes to detect vibrations of the supported beams. The first supported beam has its ends connected to second ends of the first and second connection beams. The first supported beam, the first connection beam, and the second connection beam surround one side surface of the fixing section. The second supported beam has its ends connected to second ends of the first and second connection beams. The second double-end-supported beam, the first connection beam, and the second connection beam surround another side surface of the fixing section opposite the one side surface of the fixing section.
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