Sensor capable of sensing shear force
Abstract:
A sensor able to detect shearing forces as well as simple pressure includes a substrate, a support secured to the substrate, and shear force sensing unit located at an exterior surface of the support facing away from the substrate. The support can be elastically deformed in proportion to the shearing force or pressure. The shear force sensing unit includes first piezoelectric films on outer opposing shoulders of each support, the first piezoelectric film being elastically deformed with the support and outputting a signal accordingly. The magnitude of simple pressure is recorded by similar deformation of a second piezoelectric film entirely covering its support.
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