- Patent Title: Object information obtaining apparatus, program, and imaging system
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Application No.: US14651187Application Date: 2013-12-12
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Publication No.: US09702831B2Publication Date: 2017-07-11
- Inventor: Kentaro Nagai
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA, Inc. I.P. Division
- Priority: JP2012-272672 20121213
- International Application: PCT/JP2013/084168 WO 20131212
- International Announcement: WO2014/092206 WO 20140619
- Main IPC: G03H3/00
- IPC: G03H3/00 ; G01N23/04 ; G21K1/06 ; G01N23/20 ; H01J37/252

Abstract:
The present invention relates to an object information obtaining apparatus that obtains information about a phase image of an object using information about an interference pattern produced by a shearing interferometer, the interference pattern being formed by an electromagnetic wave or electron beam passed through or reflected by the object. The apparatus includes a first obtaining unit configured to obtain information about a differential phase image of the object using the information about the interference pattern, a second obtaining unit configured to obtain information about contrast in each region of the interference pattern, a third obtaining unit configured to weight the information about the differential phase image using the information about the contrast to obtain information about a weighted differential phase image, and a fourth obtaining unit configured to integrate the information about the weighted differential phase image to obtain the information about the phase image of the object.
Public/Granted literature
- US20150308967A1 OBJECT INFORMATION OBTAINING APPARATUS, PROGRAM, AND IMAGING SYSTEM Public/Granted day:2015-10-29
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