Invention Grant
- Patent Title: MQW devices and methods for semiconductor patterning systems
-
Application No.: US14714245Application Date: 2015-05-15
-
Publication No.: US09703208B2Publication Date: 2017-07-11
- Inventor: Yibing Michelle Wang , Duhyun Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02F1/017 ; G02F1/01

Abstract:
MQW devices, IC chips and methods may be used in semiconductor lithography patterning systems. An MQW device includes an array of pixels that have transmission elements and associated support circuits. The support circuits have preliminary memory cells and final memory cells. The final memory cells store transmittance values that control transmittances of the associated transmission elements. This way, exposure of a target with a lithography system for purposes of patterning the target may be performed through the transmission elements according to the controlled transmittances, while subsequent transmittance values are being received by the preliminary memory cells from memory banks. The exposure of the target therefore needs to pause for less time, in order to wait for the MQW device to be refreshed with the subsequent transmittance values. Accordingly the whole semiconductor lithography patterning system may operate faster and thus have more throughput.
Public/Granted literature
- US20160161862A1 MQW DEVICES & METHODS FOR SEMICONDUCTOR PATTERNING SYSTEMS Public/Granted day:2016-06-09
Information query
IPC分类: