Invention Grant
- Patent Title: Integrated circuit (IC) with offset gate sidewall contacts and method of manufacture
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Application No.: US14749614Application Date: 2015-06-24
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Publication No.: US09704760B2Publication Date: 2017-07-11
- Inventor: Injo Ok , Balasubramanian Pranatharthiharan , Soon-Cheon Seo , Charan V. Surisetty
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Law Office of Charles W. Peterson, Jr.
- Agent Steven J. Meyers
- Main IPC: H01L21/3065
- IPC: H01L21/3065 ; H01L21/8238 ; H01L27/092 ; H01L23/535 ; H01L23/532 ; H01L23/528

Abstract:
A method of forming logic cell contacts, forming CMOS integrated circuit (IC) chips including the FETs and the IC chips. After forming replacement metal gates (RMG) on fin field effect transistor (finFET) pairs, gates are cut on selected pairs, separating PFET gates from NFET gates. An insulating plug formed between the cut gates isolates the pairs of cut gates from each other. Etching offset gate contacts at the plugs partially exposes each plug and one end of a gate sidewall at each cut gate. A second etch partially exposes cut gates. Filling the open offset contacts with conductive material, e.g., metal forms sidewall cut gate contacts and stitches said cut gate pairs together.
Public/Granted literature
- US20160379893A1 INTEGRATED CIRCUIT (IC) WITH OFFSET GATE SIDEWALL CONTACTS AND METHOD OF MANUFACTURE Public/Granted day:2016-12-29
Information query
IPC分类: